Senior Process Engineer, Dry Etch

Job Description

Primary Duties & Responsibilities

• Lead the development and optimization of dry etch processes (ICP, RIE) for compound semiconductor applications.
• Drive process integration and improvement initiatives to enhance device performance and yield.
• Define and control etch process parameters for GaAs and InP substrates, ensuring precision, uniformity, and repeatability.
• Utilize advanced metrology tools such as SEM, AFM, ellipsometry, profilometry, XPS, XRD, and optical interferometry for process characterization and defect analysis.
• Work closely with integration, production, and device engineering teams to integrate etch processes into the overall semiconductor fabrication flow.
• Troubleshoot process deviations, particle contamination, and chamber performance issues, implementing corrective actions and continuous improvement strategies.
• Establish and maintain Statistical Process Control (SPC) for process monitoring and optimization.
• Evaluate and qualify new etch chemistries, hardware configurations, and process automation tools.
• Develop and document process recipes, work instructions, and standard operating procedures (SOPs).
• Mentor junior engineers and provide technical leadership in semiconductor dry etch and metrology.

Education & Experience

• Bachelor's, Master's, or Ph.D. in Materials Science, Electrical Engineering, Physics, or related field.
• 10+ years of experience in semiconductor process engineering, specializing in dry etch (ICP, RIE).
• Strong background in etch chemistry, selectivity, anisotropy, and plasma physics for III-V semiconductor processing.
• Expertise in GaAs and InP processing, including device fabrication challenges and best practices.
• Hands-on experience with metrology tools such as SEM, AFM, ellipsometry, profilometry, and XPS for process verification and defect analysis.
• Strong problem-solving skills with experience in data analysis, SPC, and DOE (Design of Experiments).
• Ability to work in a cleanroom environment and interface with cross-functional engineering teams.

Skills

• Experience with high-volume semiconductor manufacturing or advanced R&D prototyping.
• Knowledge of metal etching, dielectric etching, and post-etch cleaning techniques.
• Familiarity with automation (SECS/GEM), scripting, or AI-driven process control, including FDC (Fault Detection and Classification) and APC (Advanced Process Control)
• Demonstrated leadership in technical project management and team mentoring.

Working Conditions

• Will be exposed to areas where hand tools and power tools are being operated
• Will be exposed to areas where hazardous chemicals or gases are stored
• Ability to work in a cleanroom environment per semi-conductor protocol/requirements

Physical Requirements

• Work in a class 100/1000 clean room for extended periods
• Wear full cleanroom attire (smock, mask, etc.)
• Work with and/or around chemicals (such as solids and acids)
• Stand for up to 4 hours at a time
• Lift up to 16-30 Pounds
• Push/Pull up to 16-30 pounds
• Sit for up to 4 hours at a time

Safety Requirements

All employees are required to follow the site EHS procedures and Coherent Corp. Corporate EHS standards.

Quality and Environmental Responsibilities

Depending on location, this position may be responsible for the execution and maintenance of the ISO 9000, 9001, 14001 and/or other applicable standards that may apply to the relevant roles and responsibilities within the Quality Management System and Environmental Management System.

Culture Commitment

Ensure adherence to company's values (ICARE) in all aspects of your position at Coherent Corp.:

Integrity - Create an Environment of Trust

Collaboration - Innovate Through the Sharing of Ideas

Accountability - Own the Process and the Outcome

Respect - Recognize the Value in Everyone

Enthusiasm - Find a Sense of Purpose in Work

Coherent Corp. is an equal opportunity/affirmative action employer. All qualified applicants will receive consideration for employment without regard to sex, gender identity, sexual orientation, race, color, religion, national origin, disability, protected Veteran status, age, or any other characteristic protected by law.

If you need assistance or an accommodation due to a disability, you may contact us at talentacquisition@coherent.com.

About Us

Coherent is a global leader in lasers, engineered materials and networking components. We are a vertically integrated manufacturing company that develops innovative products for diversified applications in the industrial, optical communications, military, life sciences, semiconductor equipment, and consumer markets. Coherent provides a comprehensive career development platform within an environment that challenges employees to perform at their best, while rewarding excellence and hard-work through a competitive compensation program. It's an exciting opportunity to work for a company that offers stability, longevity and growth. Come Join Us!

Note to recruiters and employment agencies: We will not pay for unsolicited resumes from recruiters and employment agencies unless we have a signed agreement and have required assistance, in writing, for a specific opening.